Electronics

A guide to hands-on MEMS design and prototyping - download pdf or read online

By Joel A. Kubby

ISBN-10: 0511984669

ISBN-13: 9780511984662

ISBN-10: 1139109898

ISBN-13: 9781139109895

ISBN-10: 1139114255

ISBN-13: 9781139114257

ISBN-10: 113912708X

ISBN-13: 9781139127080

Even if you're a pupil taking an introductory MEMS direction or a training engineer who must wake up to hurry fast on MEMS layout, this sensible consultant offers the hands-on event had to layout, fabricate and attempt MEMS units. you'll methods to use foundry multi-project fabrication tactics for inexpensive MEMS initiatives, in addition to computer-aided layout instruments (layout, modeling) that may be used for the layout of MEMS units. various layout examples are defined and analysed, from fields together with micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. there is additionally a last bankruptcy on packaging and checking out MEMS units, in addition and routines and layout demanding situations on the finish of each bankruptcy. recommendations to the layout problem difficulties are supplied online
''Whether you're a scholar taking an introductory MEMS direction or a practicing engineer who must wake up to hurry quick on MEMS layout, this functional consultant presents the hands-on event had to layout, fabricate and try out MEMS units. you'll the best way to use foundry multi-project fabrication strategies for reasonably cheap MEMS initiatives, in addition to computer-aided layout instruments (layout, modeling) that may be used for the layout of MEMS units. quite a few layout examples are defined and analysed, from fields together with micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. there is additionally a last bankruptcy on packaging and checking out MEMS units, besides and workouts and layout demanding situations on the finish of each bankruptcy. extra assets are supplied on-line, together with strategies to the layout problem difficulties and a variety of case reports of MEMS devices''--  Read more... desktop generated contents observe: 1. advent; 2. Micro-mechanics; three. Electrostatics; four. Optical MEMS; five. Thermal MEMS; 6. Fluidic MEMS; 7. package deal and try; eight. From prototype to product: MEMS deformable mirrors for adaptive optics

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Extra resources for A guide to hands-on MEMS design and prototyping

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Fearing, Microfabricated hinges, Sensor and Actuators A 33(3), pp. 249–256 (1992). A. Aksyuk, F. J. Bishop, Stress-induced curvature engineering in surface micromachined devices, SPIE 3680, pp. 984–993 (1999). T. S. T. Howe, Supercritical carbon dioxide drying of microstructures, Proc. Transducers ’93 (Yokohama), pp. 296–299 (1993). J. M. Sarro, Surface versus bulk micromachining: The contest for suitable applications, J. Micromechanical Microengineering 8, pp. 45–53 (1998). J. M. G. R. W. E. W.

W. R. S. Fearing, Microfabricated hinges: 1 mm vertical features with surface micromachining, IEEE Transducers ’91, San Francisco, CA, pp. 647–650 (1991). J. W. R. S. Fearing, Microfabricated hinges, Sensor and Actuators A 33(3), pp. 249–256 (1992). A. Aksyuk, F. J. Bishop, Stress-induced curvature engineering in surface micromachined devices, SPIE 3680, pp. 984–993 (1999). T. S. T. Howe, Supercritical carbon dioxide drying of microstructures, Proc. Transducers ’93 (Yokohama), pp. 296–299 (1993).

S. Fearing, Microfabricated hinges, Sensor and Actuators A 33(3), pp. 249–256 (1992). A. Aksyuk, F. J. Bishop, Stress-induced curvature engineering in surface micromachined devices, SPIE 3680, pp. 984–993 (1999). T. S. T. Howe, Supercritical carbon dioxide drying of microstructures, Proc. Transducers ’93 (Yokohama), pp. 296–299 (1993). J. M. Sarro, Surface versus bulk micromachining: The contest for suitable applications, J. Micromechanical Microengineering 8, pp. 45–53 (1998). J. M. G. R. W. E.

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A guide to hands-on MEMS design and prototyping by Joel A. Kubby


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